| | | | |
Chairman | Vice-Chairman |
| Jerry Coder
President Emeritus,
Semiconductor Materials
DuPont Electronic Technologies | 
| Robert P. Akins
Chairman and CEO
Cymer, Inc. |
| | | |
Board of Directors | | |
| André-Jacques Auberton-Hervé
President, CEO, and Chairman
Soitec | 
| J.C. Kim
CEO and Chairman
Edwards Korea Limited |
| Susumu Kohyama
President and CEO
Covalent Materials Corporation | 
| Stanley T. Myers
President and CEO
SEMI |
| Douglas Neugold
CEO
ATMI, Inc. | 
| Stephen G. Newberry
President and CEO
Lam Research Corporation |
| Kosei Nomiya
Chairman
Ultratech K.K. | 
| Mary Puma
Chairman and CEO
Axcelis Technologies, Inc. |
| Franz Richter
President and CEO
Thin Materials AG | 
| Stephen Schwartz
Chairman, President and CEO
Asyst Technologies, Inc. |
| Michael Splinter
President and CEO
Applied Materials, Inc. | 
| Kiyoshi (Tom) Togawa
Sr. VP & Executive Officer,
Marketing & Sales Operations
Hitachi Chemical Co., Ltd. |
| Way Tu
President and CEO
Allegro Manufacturing PTE Ltd. | 
| Kazuo Ushida
Managing Director, Sr. Exec. Officer
President of Precision Equipment Co.
Nikon Corporation |
| Richard Wallace
Chief Executive Officer
KLA-Tencor | | |
| | | | |
Ex-Officio | | |
Tetsuro Higashi
Chairman and CEO
Tokyo Electron Limited | Atsushi Horiba
President and CEO
Horiba. Ltd. |
| | |
Archie Hwang
Chairman and CEO
Hermes Epitek Corporation | |
| | |
Directors Emeritus | |
Edward H. Braun
Chairman and CEO
Veeco Instruments, Inc. | Joel A. Elftmann
President
Custom Fab Solutions |
| | |
Kenneth Levy
Chairman Emeritus
KLA-Tencor | James C. Morgan
Chairman
Applied Materials, Inc. |
| | |
Dan Quernemoen
Chairman Emeritus
Entegris, Inc | Kenichi Sekiya
Honorary Chairman
Disco Corporation |
| | |
Shigeo Takayama
Director & Honorary Chairman, Founder
Hakuto Co., Ltd. | Arthur W. Zafiropoulo
Chairman and CEO
Ultratech, Inc. |
| | |
Shoichiro Yoshida
Corporate Advisor
Nikon Corporation | |
