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General Publication Information
 
 
 
 
Standards Products
 
 
  • 3. SEMI Standards CD
    The CD contains all of the current SEMI Standards with two additional updated CDs delivered throughout the year.

 
 
Document Authoring Tools
 
 
 
 
Auxiliary Information
 
 
  • AUX001-0708
    Title: List of Wafer Supplier Identification Codes
    Committee: SEMI Standards Staff
    Cost: No Charge
  • AUX002-0600
    Title: An Overview of Factory Automation Requirements and Design
    Committee: Information & Control
    Cost: No Charge
  • AUX004-1100
    Title: SEMI S2-0200 Fire Safety Evaluation Checklist for Semiconductor Equipment Using Hazardous Production Materials
    Committee: EH&S
    Cost: No Charge
  • AUX005-1101
    Title: Comparison Matrix Between SEMI S2-93A and S2-0200
    Committee: EH&S
    Cost: As per Individual Standard
  • AUX007-0401
    Title: Comparison between SEMI S2-93A and KOSHA S Mark
    Committee: EH&S
    Cost: No Charge
  • AUX010-0304
    Title: User Interface Configurations For 300 mm Equipment Load Ports
    Committee: Physical Interfaces & Carriers
    Cost: No Charge
  • AUX012-0705
    Title: 300 mm FOUP/Load Port Interoperability Report
    Committee: Physical Interfaces & Carriers
    Cost: No Charge
  • AUX013-0705
    Title: 300 mm Equipment Supplier's Basic Operational Scenarios for Automation
    Committee: Information & Control
    Cost: No Charge
  • AUX014-0306
    Title: List of Jig Supplier Identification Codes
    Committee: SEMI Standards Staff
    Cost: No Charge
  • AUX015-1106
    Title: SEMI OCR Character Outlines
    Committee: Silicon Wafer
    Cost: No Charge
 
 
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